YWCVD-6系列6kW-10KW微波等离子体化学气相沉积(MPCVD)设备是一台高配置、多用途、高稳定中等压强微波等离子体(MPCVD)综合加工设备。它适用于单晶和多晶金刚石膜片的化学气相沉积(CVD);材料表面处理和改性;低温氧化物的生长等高新科技领域。可供钻石生产的基台为2inch,其自带的360°自动旋转功能可以更均衡地生长产品。





项目名称 | 型号 | 配置 | 数量 (套\件) | 备注 |
全自动控制系统 Fully automatic control system |
| 气压、温度、功率自动匹配 Automatic matching of air pressure, temperature and power | 1 | YUANWEN |
微波电源Microwave power supply | 6KW | 微波控制电源 微波发生器Microwave control power supply Microwave generator | 1 | YUANWEN |
微波传输系统及腔体Microwave transmission system and cavity |
| 波导、圆形腔体Waveguide, circular cavity | 1 | YUANWEN |
模式变换器mode converter |
| BJ26 | 1 | YUANWEN |
工作基台Working base | 直径6CM Diameter 6CM | 水冷却、 电动升降、 电动连续原位旋转 360度 Water cooling, Electric lift, Electric continuous in situ rotation 360 degrees | 1 | YUANWEN |
5路气体流量控制系统 5-way gas flow control system | 选5路(流量可以定制) Select 5 channels (traffic can be customized) | 500SCCM H2 60sccm N2 60sccm CH4 60sccm O2 60sccm Ar | 5 | 日本或美国 (流量计数值可能有调整)Japan or United States (Flowmeter value may be adjusted) |
真空及气体管路Vacuum and gas lines |
| 混气罐、波纹管等Mixing tank, bellows, etc | 1 | YUANWEN |
直连机械泵Directly connected mechanical pump | RVP-36 | 6L/S | 1 | YUANWEN |
薄膜计Membrane meter | MPS-2050C/D | 量程10Pa—99kPa | 1 | YUANWEN |
真空计vacuum gauge | 皮拉尼 | 10-1---10-9 Pa | 1 | 英富康America |
基片红外测温Substrate infrared temperature measurement | IRTP600DL | 高精度激光红外测温仪High precision laser infrared thermometer Temperature measurement range 150-1200 degrees | 1 | YUANWEN |
屏幕screen | 14 寸液晶屏 |
| 1 | KUNLUN |
软件software |
| 自动化控制软件,内置白色钻石生长配方。Automatic control software, built-in white diamond growth formula. |
| YUANWEN |
可按需定制